APPARATUS FOR FABRICATING SEMICONDUCTOR

摘要

PURPOSE: An apparatus for fabricating a semiconductor is provided to measure a gradient of a susceptor in a state of vacuum by installing a level measurement instrument in CVD(Chemical Vapor Deposition) equipment. CONSTITUTION: An apparatus for fabricating a semiconductor includes a process chamber(100), a susceptor(140), a level measurement instrument, and a level adjustment portion. The process chamber(100) includes a housing and a cover for opening or shutting the housing. The susceptor(140) is installed within the housing. The susceptor is used for heating a substrate. The level measurement instrument is used for measuring a gradient of the susceptor. The level adjustment portion adjusts the gradient of the susceptor.