| 摘要 |
PROBLEM TO BE SOLVED: To provide a position adjusting device capable of adjusting a position minutely with high accuracy. SOLUTION: A base 20 made of alloy steel is provided in a bottomed cylindrical vessel 14, and steel balls 23 to 25 and a movable support plate 27 are sequentially provided on the base 20 to constitute an X-Y-θadjusting part 13. A screw jack part 11 and a movable holder 30 are provided on the X-Y-θadjusting part 13. A male screw part 32 is vertically moved by rotating a nut 37 for adjustment provided integrally with a drive female screw 36 which is screw-fitted in the male screw part 32 of the screw jack part 11 and does not move vertically. Position adjustment with high accuracy becomes possible by providing a thrust ball bearing 45 between the nut 37 for adjustment and the movable holder 30 by heavy load due to load of a position adjusted body. COPYRIGHT: (C)2004,JPO
|
