| 摘要 |
PROBLEM TO BE SOLVED: To provide an accurate position sensor that is not affected by a disturbance, and an NC machine tool using the position sensor. SOLUTION: Beam light to be scanned is emitted from stator side, the beam light is reflected by a light reflection means provided on movable body side, and the reflected light is detected on the stator side, thus detecting the relative position of between the stator side and the movable body side. The beam light to be scanned forms a telecentric optical system, a slit S for shielding a portion of the beam light to be scanned is provided on the stator side, and time from the start of the scan of the beam light to be scanned to shielding by the slit is measured, thus detecting the relative position between the stator side and the movable body side. COPYRIGHT: (C)2004,JPO
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