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发明名称
CVD REAKTOR UND PROZESSKAMMER DAFÜR
摘要
申请公布号
DE60003850(T2)
申请公布日期
2004.03.11
申请号
DE20006003850T
申请日期
2000.11.30
申请人
AIXTRON AG
发明人
FRIJLINK, PETER
分类号
C23C16/455;C23C16/44;C30B1/00;C30B25/14;H01L21/205;(IPC1-7):C30B1/00
主分类号
C23C16/455
代理机构
代理人
主权项
地址
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