| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a dielectric multilayered film filter element with which cracks and exfoliation of a multilayered film part are not caused when cutting a glass substrate for subdivision and manufactures no defective articles to improve yield. SOLUTION: Dielectrics are laminated on a glass substrate 15 to form a multilayered film part 17, and the formed multilayered film part 17 and the glass substrate 15 are ground up to at least a depth equal to the thickness of the multilayered film part 17 from the surface to form grooves 21, and the glass substrate 15 is cut along the formed grooves 21, so that a force applied when cutting the glass substrate 15 is prevented from being exerted to the multilayered film part 17. As a result, the cracks and the exfoliation are not caused in the multilayered film part 17 when the glass substrate 15 is cut, and no defective articles are manufactured to improve yield. COPYRIGHT: (C)2004,JPO
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