发明名称 |
Microelectronic 3-D solenoid of circular cross-section and method for fabrication |
摘要 |
A microelectronic 3-dimensional solenoid of substantially circular or oval cross-section and a method for fabricating the solenoid. The solenoid is provided including a pre-processed semiconductor substrate, two supports upstanding from and spaced-apart on a top surface of the substrate, each support has a bottom end attached to the substrate. An inductor coil which has two spaced-apart ends each attached to one of two top ends of the two supports. The inductor coil is formed of a bi-layer metal laminate that has an inner metal layer and an outer metal layer. The outer metal layer is formed of a first metal that has a coefficient of thermal expansion larger than a coefficient of thermal expansion of a second metal that forms the inner metal layer.
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申请公布号 |
US2004046232(A1) |
申请公布日期 |
2004.03.11 |
申请号 |
US20020236271 |
申请日期 |
2002.09.05 |
申请人 |
INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE |
发明人 |
LEE HSIN-LI;LEE CHENG-HONG;CHEN YI-SHIAU |
分类号 |
H01F17/00;H01F27/29;(IPC1-7):H01L29/00 |
主分类号 |
H01F17/00 |
代理机构 |
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