发明名称 SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor device provided with a MOS transistor capable of controlling a reverse narrow effect and a narrow effect. SOLUTION: The semiconductor device comprises an element isolating field oxide film 5 formed on a semiconductor substrate 1, a channel stopper region 9 formed beneath the field oxide film 5, and the MOS transistor electrically isolated from the field oxide film 5 and the channel stopper region 9. The semiconductor device further comprises a narrow effect controlling impurity region 7 near both ends of a channel region in a channel widthwise direction of the MOS transistor, and a high-concentration impurity region 11 having an impurity concentration of the same degree as the channel stopper region 9 at a deeper position than the narrow effect controlling impurity region 7. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004079775(A) 申请公布日期 2004.03.11
申请号 JP20020237914 申请日期 2002.08.19
申请人 RICOH CO LTD 发明人 UEDA KEITOKU
分类号 H01L21/76;H01L21/762;H01L21/8238;H01L27/01;H01L27/08;H01L27/092;H01L29/10;H01L29/78;(IPC1-7):H01L21/823 主分类号 H01L21/76
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