发明名称 Device and method for tempering at least one process good
摘要 A method and for heat-treating at least one material being processed (3) under a specific process-gas atmosphere (111) of at least one process gas (4) with the aid of a heat-treatment unit (6). The heat-treatment unit has at least one energy source (5) for making the material being processed (3) take up an amount of energy, a heat-treatment container (11) with a heat-treatment space (16) for keeping the material being processed (3) under the process-gas atmosphere (111) during the heat treatment, a heat-treatment chamber (13), in which the heat-treatment container (11) is arranged at a distance (18) from the heat-treatment chamber (13), so that there is an intermediate space (14) between the heat-treatment container (11) and the heat-treatment chamber (13), and an element (19, 191) for producing in the intermediate space (14) a further gas atmosphere (141) of a further gas, different from the process-gas atmosphere (111).
申请公布号 US6703589(B1) 申请公布日期 2004.03.09
申请号 US20020111282 申请日期 2002.04.22
申请人 SHELL SOLAR GMBH 发明人 PROBST VOLKER
分类号 F27B17/00;F27D7/06;H01L21/00;H01L31/04;(IPC1-7):F27B5/14 主分类号 F27B17/00
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