| 摘要 |
A clock signal generator in an integrated circuit semiconductor device and a method of generating a clock signal, the clock signal generator comprising: a semiconductor substrate (2); an oscillator unit (4) which comprises at least one support member (10, 12) which is fixed relative to the substrate (2), an oscillator arm (6) which is oscillatably disposed to the at least one support member (10, 12) with regard a reference position, which oscillator arm (6) includes first and second conductive sections (6a, 6b) at positions extended from the at least one support member (10, 12), and at least one biasing element (14, 16) for biasing the oscillator arm (6) towards the reference position; a driver (18) which is disposed at the substrate (2) in spaced relation adjacent one of the conductive sections (6a) of the oscillator arm (6), which driver (18) is configured in use to drive the one of the conductive sections (6a) of the oscillator arm (6) towards or away therefrom when an electrical signal is applied thereto; a sensor (20) which is disposed at the substrate (2) in spaced relation adjacent the other of the conductive sections (6b) of the oscillator arm (6), which sensor (20) is configured in use to generate an electrical signal dependent upon the spacing of the other of the conductive sections (6b) of the oscillator arm (6) therefrom; loop circuitry (28) which in use receives the variable electrical signal generated by the sensor (20) and in response thereto applies an electrical signal to the driver (18) so as to cause oscillation of the oscillator arm (6) at the natural oscillating frequency of the oscillator arm (6); and a clock signal output (36) which is responsive to the variation in the variable electrical signal generated by the sensor (20) so as to provide a clock signal.
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