| 摘要 |
PROBLEM TO BE SOLVED: To provide a multi-beam scanner which can be adjustable so that respective light spots on a surface to be scanned when a subdeflector is used are as uniform in size as possible even if there is a factor causing beam waists of respective laser beams shift along an optical axis accompanying the action of the subdeflector. SOLUTION: The multi-beam scanner is so constituted that a collimator lens group 11 which converts a plurality of laser beams from a monolithic laser array 10 into parallel lights can freely move in parallel only along the optical axis. Further, one of 1st and 2nd relay lens groups 15 and 17 relaying laser beams from the collimator lens group 16 and an anamorphic prism 12 is able to freely move in parallel along the optical axis. A half-mirror 18 which reflects portions of the laser beams from the 1st and 2nd relay lenses 15 and 17 to a polygon mirror 21 is enabled to freely tilt in the vertical scanning direction. COPYRIGHT: (C)2004,JPO |
