| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid material discharging apparatus and a cleaning method in which discharge accuracy of a liquid material is improved. SOLUTION: The liquid material discharging apparatus comprises a nozzle in which thickness of an outer wall portion forming a discharge port for discharging the liquid material is 2mm or longer, and a cleaning member which moves on a surface of the outer wall portion including the discharge port for wiping up the liquid material stuck around the discharge port. COPYRIGHT: (C)2004,JPO
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