发明名称 |
Semiconductor analysis arrangement and method therefor |
摘要 |
The operability of light-based semiconductor die analysis is enhanced using a method and arrangement that can detect light leakage between a light source and a die. In one example embodiment of the present invention, a light source is directed to a semiconductor analysis arrangement using, for example, a fiber optic cable. The analysis arrangement is adapted to use light from the light source for analyzing the die. A light detection arrangement detects a condition of light leakage from the system and generates a signal representing the condition of light leakage. The generated signal can then be used to control the semiconductor analysis arrangement, such as by deactivating the light source in response to a detected leak, or by allowing the light source to function in response to not detecting a leak.
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申请公布号 |
US6700659(B1) |
申请公布日期 |
2004.03.02 |
申请号 |
US20010838671 |
申请日期 |
2001.04.19 |
申请人 |
ADVANCED MICRO DEVICES, INC. |
发明人 |
CHUNDURI SRIKAR V.;GILFEATHER GLEN P.;DAVIS BRENNAN V.;EPPES DAVID H.;BRUCE VICTORIA;BRUCE MICHAEL;RING ROSALINDA M.;STONE DANIEL |
分类号 |
G01N21/95;G01R31/311;(IPC1-7):G01N21/88 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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