| 发明名称 |
Method to fabricate silicon chromatographic column comprising fluid ports |
| 摘要 |
A new method for fabricating a silicon chromatographic column comprising through-substrate fluid ports has been developed. This new method enables the fabrication of multi-layer interconnected stacks of silicon chromatographic columns.
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| 申请公布号 |
US6699392(B1) |
申请公布日期 |
2004.03.02 |
| 申请号 |
US20020167238 |
申请日期 |
2002.06.10 |
| 申请人 |
SANDIA CORPORATION |
发明人 |
MANGINELL RONALD P.;FRYE-MASON GREGORY C.;HELLER EDWIN J.;ADKINS DOUGLAS R. |
| 分类号 |
G01N30/60;(IPC1-7):B01D15/08 |
主分类号 |
G01N30/60 |
| 代理机构 |
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