| 摘要 |
Method for drying a microstructure member having many micro concavities in a surface, the micro concavities containing water, includes adjusting the temperature of liquid inside the micro concavities to a temperature in the range of the cloud point of a surfactant ±1° C., and supplying a mixture of the surfactant and a hydrophobic solvent adjusted to a temperature in the range of the cloud point ±1° C. into the micro concavities to remove part or all of the water; heating the liquid inside the micro concavities to a temperature exceeding the cloud point +1° C., and supplying the hydrophobic solvent controlled to a temperature exceeding the cloud point +1° C. into the micro concavities to replace the liquid in the concavities with the hydrophobic solvent; and placing the resulting microstructure member with the concavities into contact with liquid or supercritical carbon dioxide to replace the hydrophobic solvent with the liquid or supercritical carbon dioxide.
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