| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a lapping oil composition easily removing free abrasive slurry after fixing abrasive grains and performing a highly precise finish polishing and to provide a finish polishing method for a composite material. <P>SOLUTION: When polishing the composite material comprising different-hardness materials, this lapping oil composition for the finish polishing is used after performing a main polishing while dripping polishing solution including abrasive grains on a lapping table. The lapping oil composition comprises by including, at least, one type of amine compounds in nonaqueous solvent including no abrasive grains. In polishing the composite material, after the abrasive grains are fixed on the lapping table using the free abrasive grain slurry composition, which uses the nonaqueous solvent as main component and includes the abrasive grains dispersed by nonionic surfactants, the unfixed polishing grains are removed therefrom while dripping the lapping oil composition for finish polishing to the composite material which is disposed on the lapping table and composed of different-hardness material, and performs the finish polishing. <P>COPYRIGHT: (C)2004,JPO</p> |
