| 摘要 |
PROBLEM TO BE SOLVED: To provide a variable capacitance element and a switch of small size, high performance and high quality in an electric circuit which is integrated especially with high concentration, regarding a mechanical variable capacitance element. SOLUTION: An electrode in which beam is bent by electrostatic force is divided into a plurality. By imparting the function of supporting beam tip, the function as an AC signal line and the function of eliminating stiction to each of the divided electrode, deterioration of the quality and performance which is due to residual stress, thermal expansion and stiction is restrained in a simple constitution. COPYRIGHT: (C)2004,JPO |
