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发明名称
Verfahren und Vorrichtung zur In-situ-Dekontamination eines EUV-Lithographiegerätes
摘要
申请公布号
DE10061248(B4)
申请公布日期
2004.02.26
申请号
DE20001061248
申请日期
2000.12.09
申请人
CARL ZEISS
发明人
HAMM, UWE W.
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/20;G01B17/02;G01B11/02
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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