SUBSTRATE DEVICE, MANUFACTURING METHOD THEREOF, ELECTRO-OPTICAL DEVICE AND ELECTRONIC APPARATUS

摘要

PURPOSE: A substrate device, a manufacturing method thereof, an electro-optical device and an electronic apparatus are provided to maintain favorable transistor characteristics over a long period. CONSTITUTION: A TFT(Thin Film Transistor) and a capacitor are formed on a substrate(200). The TFT contains a semiconductor layer(202). The capacitor has the first electrode(216) electrically connected to a part of the semiconductor layer, the second electrode(218) disposed to face the first electrode, and a dielectric film disposed between the first and second electrodes and containing a nitride film(208B). The capacitor is formed on the TFT. The nitride film has an opening(208BM) through which the semiconductor layer is seen in the top view. When the opening is utilized, the semiconductor layer is hydrogenated effectively.