发明名称 METHOD FOR MANUFACTURING MICROMIRROR
摘要 PURPOSE: A method for manufacturing a micromirror is provided to easily manufacture the micromirror by using a simple and chip ultra fine mirror surface mechanical fabrication method in place of a conventional method utilizing a complex semiconductor process and an expensive device. CONSTITUTION: A method for manufacturing a micromirror includes: a step of stacking a plurality of thin plates(20); a step of fabricating the plurality of thin plates(20) in such a way that a mirror surface is formed at the side surface of the stacked plurality of thin plates(20); and a step of cutting the mirror surface fabricated thin plates(20) to obtain a plurality of micromirrors.
申请公布号 KR20040016040(A) 申请公布日期 2004.02.21
申请号 KR20020048232 申请日期 2002.08.14
申请人 KOREA INSTITUTE OF MACHINENRY & MATERIALS 发明人 CHOI, DU SEON;JE, TAE JIN;LEE, EUNG SUK;SHIN, BO SEONG
分类号 G02B26/08;(IPC1-7):G02B26/08 主分类号 G02B26/08
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