发明名称 |
METHOD FOR MANUFACTURING MICROMIRROR |
摘要 |
PURPOSE: A method for manufacturing a micromirror is provided to easily manufacture the micromirror by using a simple and chip ultra fine mirror surface mechanical fabrication method in place of a conventional method utilizing a complex semiconductor process and an expensive device. CONSTITUTION: A method for manufacturing a micromirror includes: a step of stacking a plurality of thin plates(20); a step of fabricating the plurality of thin plates(20) in such a way that a mirror surface is formed at the side surface of the stacked plurality of thin plates(20); and a step of cutting the mirror surface fabricated thin plates(20) to obtain a plurality of micromirrors.
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申请公布号 |
KR20040016040(A) |
申请公布日期 |
2004.02.21 |
申请号 |
KR20020048232 |
申请日期 |
2002.08.14 |
申请人 |
KOREA INSTITUTE OF MACHINENRY & MATERIALS |
发明人 |
CHOI, DU SEON;JE, TAE JIN;LEE, EUNG SUK;SHIN, BO SEONG |
分类号 |
G02B26/08;(IPC1-7):G02B26/08 |
主分类号 |
G02B26/08 |
代理机构 |
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地址 |
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