| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To efficiently, stably obtain high output, and to enable operation at a deep-ultraviolet wavelength region that can be used for industrial uses. <P>SOLUTION: There are provided an infrared laser oscillator 1; a ultraviolet laser oscillator 2 for oscillating ultraviolet light by a single-mode light; a resonator 4 for taking in the ultraviolet light, oscillated from the ultraviolet laser oscillator 2, to make it resonate; and a nonlinear crystal 3 provided in the resonator 4. The ultraviolet light, that is taken in the resonator 4 for resonating, is made to pass through the nonlinear crystal 3, and to make the the nonlinear crystal 3 infrared rays oscillated from the infrared laser oscillator 1 conduct single pass, thus generating a sum frequency and make deep-ultraviolet light output. <P>COPYRIGHT: (C)2004,JPO</p> |
