| 摘要 |
PROBLEM TO BE SOLVED: To provide a non-contact ultrasonic gap detection sensor for performing non-contact gap measurement with high accuracy. SOLUTION: This non-contact ultrasonic gap detection sensor 12 is equipped with an excitation means 26 for creating a sound field between a vibrator measuring object side end face 24a and a measuring object 20 by axially resonating a vibrator 24 with a support point of the ultrasonically vibrating vibrator 24 relative to a holder 22 used as a vibration node, and a detection means 28 for detecting the vibration state quantity of the vibrator 24 changing due to sound pressure, in accordance with a gap 1 between the end face 24a and the object 20, received by the end face 24a. By using a change of the vibration state quantity of the vibrator 24 caused by the sound pressure received by the end face 24a in accordance with the gap 1, the state quantity of the vibrator 24 is detected by the detection means 28, thereby obtaining information on the gap 1 between the end face 24a and the object 20. COPYRIGHT: (C)2004,JPO
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