Interferometric measuring device for determining the shape, roughness or distance of the surface of a measurement object comprises a measurement probe coupled to an interferometer via an optical fiber arrangement

摘要

Interferometric measuring device for determining the shape, roughness or distance of the surface of a measurement object comprises a modulation interferometer, a measurement probe coupled to the interferometer via an optical fiber arrangement and in which combined partial beams in a partly reflecting region (3.3) are divided into a measurement beam and a reference beam, a receiving device, and an evaluating device. The partly reflecting region is formed by an emergence surface (3.31) of a probe fiber (3.1) with an emergence angle (alpha) relative to the optical probe axis (3.5) and an incidence surface (3.32) of an object-side fiber section (3.2) having an incidence angle (beta) likewise relative to the optical probe axis. A wedge-shaped gap is formed between the emergence surface and the incidence surface. Preferred Features: The emergence surface and the incidence surface are angled in the same direction relative to the probe axis.