| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sintering method with which the production yield and the producing efficiency can be improved by efficiently restraining the warp developed when sintering material target, especially ceramics target is sintered. <P>SOLUTION: When plurality of rectangular targets are sintered in a sintering furnace having a rectangular furnace hearth, the longitudinal direction of the rectangular targets is disposed so as to be at the right angle to the width direction of the sintering furnace. <P>COPYRIGHT: (C)2004,JPO |
