BARRIER TRANSPARENT LAMINATED FILM AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To obtain a laminated film having both of transparency and steam barrier pieperties and suitable for a packaging or sealing material of every kind or a substrate for electronic machinery.

SOLUTION: A silicon nitride film is formed on a transparent resin film substrate by the sputtering of a silicon target in a nitrogen-containing atmosphere to form the silicon nitride film to form a barrier transparent laminated film with a steam permeability of 0.05 g/m2/day and parallel light transmissivity of 80% or more.

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