发明名称 GAS DISCHARGE LASER
摘要 The invention relates to an excimer laser comprising a laser tube (1), in which primary electrodes (5, 6) are arranged. A gas discharge takes place between the primary electrodes (5, 6). The laser tube (1) essentially consists of a ceramic material.
申请公布号 WO2004013940(A2) 申请公布日期 2004.02.12
申请号 WO2003EP08328 申请日期 2003.07.28
申请人 LAMBDA PHYSIK AG;BORISOV, VLADIMIR, MICHAILOVICH;KHRISTOFOROV, OLEG, BORISOVICH 发明人 BORISOV, VLADIMIR, MICHAILOVICH;KHRISTOFOROV, OLEG, BORISOVICH
分类号 H01S1/00;H01S3/03;H01S3/038 主分类号 H01S1/00
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