Magnetic field particle optical device for using a magnetic field to deflect charged particles in a beam has a magnetic-flux-conducting body, a current conductor and a temperature moderator

摘要

A magnetic field deflects loaded particles in a beam of loaded particles. A magnetic-flux-conducting body (MFCB) (45) made from material with a relative permeability (RP) is partly encompassed by a current conductor (47). A moderating device (49) adjusts a temperature in the MFCB to a desired temperature. Relative swing in RP regarding temperature range can be less than a limiting value. Independent claims are also included for the following: (a) A method for deflecting charged particles in a beam of charged particles; (b) and for a lithography system for transmitting a pattern by means of an ink jet; (c) and for a microscopy system for generating an optical image of an object.