| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized optical deflector capable of being driven at a high speed and being driven at a low voltage, for which a large deflection angle is taken, the static flatness of a reflection surface is excellent and distortion is reduced even at the time of a high speed operation, and its manufacturing method. SOLUTION: In the optical deflector, a movable plate is driven relatively to a supporting substrate and incident light made incident on the reflection surface is deflected. At least two or more recessed parts are formed on the surface where the reflection surface is not formed of the movable plate and a magnetic body is formed at the recessed part. COPYRIGHT: (C)2004,JPO
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