| 发明名称 |
Piezoelectric on semiconductor-on-insulator microelectromechanical resonators and methods of fabrication |
| 摘要 |
A piezoelectric resonator is disclosed. In one embodiment the piezoelectric resonator includes a semiconductor material, an electrode, and a piezoelectric material disposed between the semiconductor material and the electrode.
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| 申请公布号 |
US2004021403(A1) |
申请公布日期 |
2004.02.05 |
| 申请号 |
US20030631948 |
申请日期 |
2003.07.31 |
| 申请人 |
GEORGIA TECH RESEARCH CORPORATION |
发明人 |
AYAZI FARROKH;PLAZZA GIANLUCA;ABDOLVAND REZA;HO GAVIN KAR-FAI;HUMAD SHWETA |
| 分类号 |
H03H3/02;H03H9/02;(IPC1-7):H02N2/00;H01L41/04 |
主分类号 |
H03H3/02 |
| 代理机构 |
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| 主权项 |
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