Process and device for cleaning a lapping disc has two parallel plates with an integrated high pressure hose feeding a fluid and with suction removal

摘要

A cleaning device comprises two parallel plates (1,2) with at least one integrated high-pressure hose (6) for conducting a cleaning fluid jet (9) and with a ring suction opening (7) around each hose connected to a suction pump. An Independent claim is also included for a cleaning process using the above device.