SUBSTRATE ASSEMBLING DEVICE

摘要

PROBLEM TO BE SOLVED: To facilitate maintenance and inspection of the inside of a decompression chamber wherein alignment of large-sized substrates is carried out and to carry out the alignment operation with high accuracy. SOLUTION: The substrate assembling device laminates two substrates in a decompression state. The chamber has a structure separated into upper and lower parts. An upper table to firmly fix one of the substrates freely attachably and detachably and a lower table to firmly fix the other substrate freely attachably and detachably are respectively provided in the upper and lower chambers so as to locate the respective substrates opposite to each other. The upper table is equipped with a driving mechanism to vertically move the upper table and the upper chamber on the outside of the upper chamber. The lower table is integrally joined to the lower chamber and is equipped with a driving means to move in at least a horizontal direction with respect to the upper chamber on the outside of the lower chamber. COPYRIGHT: (C)2004,JPO