METHOD FOR PRODUCING NITROGEN TRIFLUORIDE NF3 USING JET-LOOP REACTOR

摘要

PURPOSE: Provided is a method for producing nitrogen trifluoride NF3 at low temperature with high yields by effectively making ammonium bifluoride molten salt come into contact with fluoride. CONSTITUTION: The method comprises the steps of forming fine liquid droplets of ammonium bifluoride molten salt by spraying ammonium bifluoride molten salt in a reactor(10) from a lower part to an upper part thereof through nozzles, and making the ammonium bifluoride molten salt droplets come into contact with fluoride gas being introduced into the reactor(10) by a fluoride suction pipe(32), wherein the fluoride gas supply into the reactor is intermittently stopped and ammonia gas is introduced into the reactor(10) at that time to regenerate ammonium bifluoride in the reactor to keep concentration of ammonium bifluoride molten salt in the reactor(10) to a certain degree.