| 摘要 |
PROBLEM TO BE SOLVED: To provide a static pressure gas bearing where a very small clearance is formed from a matching surface of side plates of upper and lower plates 30 and 33 forming a movable plate, and the degree of vacuum is not lowered by preventing the leakage of compressed gas from there. SOLUTION: A highly hermetic solvent is applied on the side plates Y1 and Y2 of the upper and lower plates 30 and 33, and the side plate X at the opposite side to the side plate fixed axis body so that the compressed gas does not flow out of the very small clearance of the matching surface of the upper and lower plates and the side plates. COPYRIGHT: (C)2004,JPO
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