| 摘要 |
PROBLEM TO BE SOLVED: To provide a low cost temporarily positioning mechanism which can temporarily position a work with sufficient positional accuracy and good reproducibility while a rear surface of the work and a state are held in a non-contact manner as they are. SOLUTION: The temporarily positioning mechanism of the work W for temporarily positioning a flat plate-like work W on a supporting surface 1c of the stage 1 includes a plurality of jet holes 1d, oblique means 2a, 3a provided on a support surface 1c side to inject gas to the work W, and a locking means provided at a predetermined position of the supporting surface 1c for locking a side face of the work W to the temporarily positioning position. COPYRIGHT: (C)2004,JPO |
