| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical heating device in which a flush lamp is set to be a light source and a crack of a silicon wafer is prevented. SOLUTION: The device is provided with the flush lamps (20) with which rare gas is filled, a casing (32) surrounding the flush lamps (20), a stage on which the silicon wafer with which radiation light from the flush lamps is irradiated is placed, and a feeder system controlling emission of the flush lamps. In one emission of the flush lamp in a stage face, a ratio B/A: an integrated radiant power B in the range of 370nm to 800nm in wavelength to an integrated radiant power A in a range of 220nm to 370nm in wavelength is 1.0 or above. COPYRIGHT: (C)2004,JPO
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