发明名称 Process for producing gas- and liquid-impermeable layers on a substrate
摘要 Production of gas and liquid impermeable layers on a substrate (1), involves generating an arc discharge (10) between an electrode and a coating material (16) and introducing carbon or a carbon containing compound between the coating material and the substrate.
申请公布号 EP1273676(A3) 申请公布日期 2004.01.28
申请号 EP20020013237 申请日期 2002.06.17
申请人 APPLIED FILMS GMBH & CO. KG 发明人 KREMPEL-HESSE, JOERG, DR.;LIEHR, MICHAEL, DR.;HACKER, VOLKER;SOMMER, ELISABETH, DR.;GRIMM, HELMUT, DR.
分类号 C23C14/00;C23C14/06;C23C14/24;C23C14/32 主分类号 C23C14/00
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