| 摘要 |
PURPOSE: A structure of a cover plate for photo mask is provided to prevent the damage of cover plate caused by contamination material and enhance the productivity by exchanging only a detachable cover. CONSTITUTION: A structure of a cover plate for photo mask includes a photo mask(10), a cover plate(30), and an electrode(40). The photo mask(10) is used for forming a pattern on a photoresist layer laminated on a wafer. The cover plate(30) is used for installing and fixing the photo mask into a rectangular installation groove. The electrode(40) is used for supporting a bottom face of the cover plate(30). A detachable cover is installed between an outer circumference of the photo mask and an inner wall of the cover plate. The detachable cover is formed with quartz.
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