| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a magnetic neutralline discharge plasma treatment device in which a metal such as opaque steel can be used without using a magnetic wall in the vacuum chamber, while generating a low voltage and low temperature high density plasma and maintaining time-space and spatial control concerning the size and the location of the generated plasma, and which is of low cost and has wide applications. <P>SOLUTION: The discharge plasma treatment device comprises a magnetic field generating means that is formed of a link of positions of magnetic field "zero"existing in succession in the vacuum chamber and generates a magnetic neutralline of a shape and size corresponding to the shape and size of the treated object, and an electric field generating means arranged in the vacuum chamber and generates a discharge plasma in the space containing the magnetic neutralline, by impressing a high frequency electric field in the inclined direction including a right angle to the magnetic neutralline generated in the vacuum chamber by the magnetic field generating means. <P>COPYRIGHT: (C)2004,JPO |
