| 摘要 |
PROBLEM TO BE SOLVED: To provide a pattern inspection method for shortening inspection time by not carrying out circuit pattern inspection for the rest of failure inspection units that follow at the point of a failure inspection unit is determined since these parts are discarded as a result. SOLUTION: The pattern inspection method for inspecting the good/failure of circuit patterns formed in a film-shaped belt work 6 takes the plurality of circuit patterns formed in the belt work 6 as one inspection unit, and sets an allowed number of failure circuit patterns contained in one inspection unit. The inspection device stops the inspection of an inspection unit when the number of failure circuit patterns in one inspection unit exceeding the allowed number is determined during the inspection, and moves the inspection to next inspection unit. COPYRIGHT: (C)2004,JPO
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