| 摘要 |
PROBLEM TO BE SOLVED: To provide a drying processing method for a probe fixing face capable of preventing a component of a probe solution used for fixing a probe from being left ununiformly on a probe fixing face, when the probe fixing face on a substrate is dried. SOLUTION: When the substrate having a probe coupling face coupled with the probe coupled specifically to a target substance is dried, a liquid is supplied to the probe fixing face, the probe coupling face is frozen together with the liquid, the face is thereafter placed under a reduced pressure environment, and a solvent component in a frozen part is sublimated to be removed, so as to dry the probe coupling face. COPYRIGHT: (C)2004,JPO
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