PLASMA FLOOD GUN FOR ION INJECTION SYSTEM

摘要

PURPOSE: A plasma flood gun is provided to lengthen the useful life of the gun by delaying the time of depositing metal particles on the insulator. CONSTITUTION: A plasma flood gun(100) comprises a filament(110) for emitting thermal electrons, and an insulator(130) arranged between both terminals of the filament, and which insulates the body of an arc chamber(120) from the terminal of the filament. The insulator has a top surface on which a groove(132) for deposition of metal particles is formed so as to prevent breakdown of insulation of the filament. The groove has a side surface(132a) which has hollows(134) for increasing the surface area.