| 摘要 |
PURPOSE: A method for fabricating an image sensor with a fuse box is provided to improve yield of an image sensor by performing a laser repair process and by preventing an etch defect in an etch process for forming a laser repair fuse box. CONSTITUTION: A fuse(37) is formed on an isolation layer of a semiconductor substrate(30) having a light receiving device(32). A metal pad(33,34,35) surrounded by an insulation layer(36) is formed on the semiconductor substrate. A micro lens(38) is formed on the light receiving device. A part of the insulation layer is selectively etched to for the first fuse box(40) of the first width by using a fuse box etch mask. The insulation layer is selectively etched to make the insulation layer under the first fuse box thinner as compared with the periphery so that the second fuse box(42) of the second width narrower than the first width is formed to cut the fuse in a laser blowing process.
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