| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a measuring microscope device which reduces the burden imposed upon the operator for measurement by making an area from which three-dimensional coordinate data are acquired easily identifiable from another area from which the data are not acquired. <P>SOLUTION: When multipoint measurement is started, a mark indicating the present position of an XY table is displayed on a measuring area divided into a mesh-like state in accordance with an instruction from the operator and the mesh area containing the mark is displayed in a state where the area can be distinguished from the other mesh areas. When the XY table is moved and enters into a mesh area from which the three-dimensional coordinate data are not acquired, the three-dimensional coordinate data of a point of measurement when focused is acquired by executing autofocus and the mesh area is displayed so that the area may be distinguished from mesh areas from which the three-dimensional coordinate data are not acquired. Consequently, the operator can avoid loosing sight of a point of measurement from which the three-dimensional coordinate data must be acquired, because the operator can easily discriminate the area from which the three-dimensional coordinate data are acquired from areas from which the data are not acquired. <P>COPYRIGHT: (C)2004,JPO |
