CLEANING METHOD AND CLEANING EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide cleaning equipment and a cleaning method capable of cleaning an object to be cleaned efficiently. SOLUTION: Fluid is introduced into a cleaning chamber where an object to be cleaned containing a porous material at least partially is placed and then the fluid is pressurized and de-pressurized. The removal of contaminants from the porous material is difficult because the contaminants intrude into the porous material through pores thereof. The contaminants can be removed efficiently when the fluid for cleaning the porous material is pressurized and de-pressurized. The fluid permeates into the porous material when it is pressurized and returns back from the interior of the porous material when it is de-pressurized. The contaminants are discharged along with the fluid from the interior of the porous material when the fluid is de-pressurized. Consequently, the contaminants are removed effectively from the porous material. COPYRIGHT: (C)2004,JPO