TRANSPARENT CONDUCTIVE SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To obtain a transparent conductive substrate for liquid crystal displays which has a low resistance, sufficient optical transparency and high display quality. SOLUTION: In a transparent conductive substrate for liquid crystal displays, an electric power of 1 W/cm2with a high frequency voltage above 100 kHz is supplied between facing electrodes to excite active gas into a plasma state; and a substrate is exposed in the active gas in plasma state to form a transparent conductive film on it. COPYRIGHT: (C)2004,JPO