发明名称 METHOD FOR MANUFACTURING MAGNETIC STORAGE DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a magnetic storage device in which the switching current of write-wiring is small and dispersion is little. SOLUTION: This method comprises the process of forming a magneto-resistance effect element 20, the process of forming a first insulation film 30 so as to cover the magneto-resistance effect element, the process of forming a coating film 32 so as to cover the first insulation film, the process of exposing the upper surface of the magneto-resistance effect element, the process of forming upper write-wiring 40 on the magneto-resistance effect element, the process of exposing the first insulation film at the side of the magneto-resistance effect element by removing a part or all of the coating film, and the process of forming a yoke structure member 48a so as to cover at least the side part of the upper write-wiring and to be in contact with the exposed first insulation film. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004006729(A) 申请公布日期 2004.01.08
申请号 JP20030078282 申请日期 2003.03.20
申请人 TOSHIBA CORP 发明人 AMANO MINORU;UEDA TOMOMASA;KISHI TATSUYA;SAITO YOSHIAKI;YODA HIROAKI
分类号 H01L27/105;G11C11/15;H01L21/8246;H01L43/08;(IPC1-7):H01L27/105 主分类号 H01L27/105
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