发明名称 |
SEMICONDUCTOR WAFER WITH SPACER AND MANUFACTURING METHOD THEREOF, SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF, CIRCUIT BOARD, AND ELECTRONIC APPARATUS |
摘要 |
<P>PROBLEM TO BE SOLVED: To form spacers for isolating semiconductor chips with high productivity on the semiconductor chips in a method for enhancing the integration degree by laminating the semiconductor chips and bonding them. <P>SOLUTION: A mold 40 having a plurality of holes is set on a semiconductor wafer having a plurality of semiconductor elements or a plurality of the semiconductor chips 20 two-dimensionally placed on a substrate 10 and the die is removed after filling paste 49 being a material for a spacer 50 into the holes to form the spacer 50 on the respective chips 20 together. <P>COPYRIGHT: (C)2004,JPO |
申请公布号 |
JP2004006670(A) |
申请公布日期 |
2004.01.08 |
申请号 |
JP20030045875 |
申请日期 |
2003.02.24 |
申请人 |
SEIKO EPSON CORP |
发明人 |
TOMIMATSU HIROYUKI |
分类号 |
H01L25/18;H01L25/065;H01L25/07 |
主分类号 |
H01L25/18 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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