METHOD FOR MAKING FOREIGN MATTER HARMLESS

摘要

PURPOSE: To provide a method for making foreign matter harmless by which foreign matter present in the transmission region of a pellicle attached reticle can be made harmless without detaching the pellicle. CONSTITUTION: In the method for making foreign matter harmless, foreign matter present in the transmission region of a pellicle attached reticle is made harmless by irradiation through the pellicle membrane with laser light of a wavelength which passes through the pellicle membrane.