| 摘要 |
An acceleration sensor includes a bimorph type acceleration detection element including a first resonator and a second resonator, each resonator formed of a piezoelectric body and having electrodes arranged on both main surfaces thereof, and an intermediate layer. The acceleration detection element is produced by bonding the first resonator and the second resonator with the intermediate layer interposed therebetween. The acceleration detection element is supported at one longitudinal end or opposed longitudinal ends thereof so that the first and second resonators are integrally deflected under acceleration. The intermediate layer is hard enough to transfer flexural stress in one of the first and second resonator to the other of the first and second resonators and the vibration of the one of the first and second resonators is attenuated when the vibration is transmitted from the one to the other of the first and second resonators. Acceleration is detected by detecting a difference between frequency changes of the first resonator and the second resonator or a difference between impedance changes of the first resonator and the second resonator, which takes place under acceleration.
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