发明名称 Galvanometer controller and laser machining apparatus
摘要 A galvanometer controller capable of control with stability and with immunity to changes with time and variation in environment temperature and having improved operability and expandability, and a laser machining apparatus having the galvanometer controller. The galvanometer controller comprises a correcting arrangement formed in a digital circuit, the correcting arrangement having a distortion correction section for correcting a working distortion of an optical unit including a lens, an orthogonality correction section for correcting the orthogonality between the two axes of the galvanometer, and a linearity correction section for correcting the linearity on each of the two axes.
申请公布号 US6674045(B2) 申请公布日期 2004.01.06
申请号 US20020090780 申请日期 2002.03.06
申请人 NEC CORPORATION 发明人 IWASE KAZUAKI;OKANO AKIHIKO
分类号 B23K26/08;G02B26/10;(IPC1-7):B23K26/00 主分类号 B23K26/08
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