摘要 |
A galvanometer controller capable of control with stability and with immunity to changes with time and variation in environment temperature and having improved operability and expandability, and a laser machining apparatus having the galvanometer controller. The galvanometer controller comprises a correcting arrangement formed in a digital circuit, the correcting arrangement having a distortion correction section for correcting a working distortion of an optical unit including a lens, an orthogonality correction section for correcting the orthogonality between the two axes of the galvanometer, and a linearity correction section for correcting the linearity on each of the two axes.
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