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经营范围
发明名称
Exposure apparatus
摘要
申请公布号
EP0834772(B1)
申请公布日期
2004.01.02
申请号
EP19970307732
申请日期
1997.10.01
申请人
CANON KABUSHIKI KAISHA
发明人
TAKAHASHI, KAZUHIRO;IWAMOTO, KAZUNORI
分类号
G03F7/20;H01L21/027;(IPC1-7):G03F7/20
主分类号
G03F7/20
代理机构
代理人
主权项
地址
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